Thiru. Dev Raj Dev, I.A.S.,.,
Principal Secretary/ Vice Chairman
Science City
Gandhimandapam Road, Chennai - 600 025
திு. தவ் ராஜ் தேவ, இ. ஆ. ப.,
முதன்மைச் செலர்/துணைத்லைவர்
அறிியல் நகம்
காந்திண்டபம் சால, செ்னை - 600 025
| 1 | Thiru P. Rangamani, I.A.S. | 24.01.1995 to 13.02.1997 |
| 2 | Tmt. C.K. Gariyali. I.A.S. | 20.10.1998 to 21.05.2001 |
| 3 | Tmt. Sheela Rani Chunkath I.A.S. (Additional Charge) | 22.05.2001 to 25.06.2001 |
| 4 | Thiru A. M. Raman, I.A.S. | 26.06.2001 to 29.09.2006 |
| 5 | Thiru K. Ganesan, I.A.S. (Additional Charge) | 30.09.2006 to 03.01.2007 |
| 6 | Thiru Mohan Varghese Chunkath, I.A.S. Principal Secretary | 04.01.2007 to 09.01.2008 |
| 7 | Dr. V. Varaprasada Rao, I.A.S. Principal Secretary | 14.01.2008 to 04.08.2008 |
| 8 | Dr. T.S. Sridhar, I.A.S. Principal Secretary | 05.08.2008 to 15.02.2009 |
| 9 | Dr. P. Iyamperumal, M.E., Ph.D. (Additional Charge) | 16.02.2009 to 21.05.2011 |
| 10 | Thiru V.K. Subburaj, I.A.S. Principal Secretary | 22.05.2011 to 16.04.2013 |
| 11 | Dr. J. Uma Maheswari, I.A.S (Additional Charge) | 17.04.2013 to 07.08.2013 | 12 | Thiru M. Kutralingam, I.A.S. Additional Chief Secretary | 08.08.2013 to 31.07.2014 |
| 13 | Thiru Kumar Jayanth, I.A.S., (Additional charge) | 01.08.2014 to 07.09.2014 |
| 14 | Thiru. U. Sagayam, I.A.S., | 08. 09. 2014 – 02.01.2021 |
| 15 | Thiru. Rajesh Lakhoni, I.A.S., Principal Secretary (Full Additional Charge) | 07.01.2021 – 09.06.2021 |
| 16 | Dr. D. Karthikeyan, I.A.S., Principal Secretary (Full Additional Charge) | 09.06.2021 – 30. 06.2021 |
| 17 | Tmt. S. Malarvizhi, I.A.S., | 30.06.2021 – 11. 07.2023 |
| 18 | Thiru. Dev Raj Dev, I.A.S., Principal Secretary/ Vice Chairman | 27.07.2023 - |